Industrial Equipment

Brand-new technology learned from the universe

Mitaka has been manufacturing precision instruments that are loaded with space hardware technology. And, these instruments function as “standard” in various industries. Above all, non-contact 3D measuring instruments with laser autofocus systems are disseminated widely in domestic semiconductor industry and ultraprecision processing field in Japan. And this laser autofocus system was named as “point autofocus profiling” and registered in ISO 25178 (International Standard of 3D profile and surface texture) as one of Japanese measuring technology in 2008. The point autofocus profiling is officially standardized as ISO 25178-605 (Point autofocus probe) in 2014. Mitaka continues to offer this “brand-new” technology to the world.

Select from products Measurement examples

Point autofocus probe 3D measuring instrument

NH Series

The perfect solutions for measuring aspherical lens, LCD lgith panel, moldings, etc.

Point autofocus probe 3D form measuring instrument

MLP Series

A compact laser probe head and 5-axis control enable all-round contour measurements

Point autofocus probe surface texture measuring instrument


Scan autofocus (Scan AF) system offers fast measurement and has large measuring area with high accuracy in the sub-micrometer level

Laser probe application products

MP-3 Series

Offering high precision measurements on finishing machine and manufacturing line

High precision chip bonder

FAMIC Series

High precision mounting device of a vacuum suctioned chip

Industrial Equipment

Table of specification

Specification Comparison

Select from measurement examples Products

Plate thickness

Evaluation of plate thickness and step dimensions

lens barrel form

Tilt AF function (optional) developed!

Rubber products

Dimensional evaluation of soft materials having low reflection

Fresnel lens molding die

High precision measurement of a transparent lens with steep angles.


High speed and high precision measurements of sub-micrometer grooves.

Volume of solder

Volume and height evaluation of solder out of 3D surface.

Dicing blade warpage

High speed measurement of a circular pattern by using the Mask Measurement.

Microlens array

Tracking rugged lens surface.

HDD head suspension

Measurement of delicate sample which easily distorts by one gentle touch.

High-density mounting board

Fine structure in a large area.

Surface of aspherical lens molding die

Diamond turning processed surface.


High precision measurement of delicate material.

Human hair

Capturing fine structure.

Unevenness of evaporated metal film

High precision measurement of nano-meter level unevenness.

Diamond abrasive grain

Cutting edge profile and projection height measurements.

Tip of turning tool

Offering 3D view, size evaluation and roughness measurement.


Enhanced functions for profile and height measurements, coplanarity evaluation, etc.

Warpage and waviness of wafer

High speed measurement of total warpage and waviness of wafer.

Oblique incidence X-ray mirror

Measuring large sample in sub-micrometer level.

Grinding work surface

Calculating areal roughness out of measuring area.

Wear volume of brake pad

Separating burr / contact surface / wearing surface and calculating Abbott-Firestone curve.

Plastic gear

High precision measurement of plastic gear with low reflectivity.


Capable of measuring microgears with less than module 0.1 which contact measuring instrument cannot measure.

Internal gear

Capable of measuring internal tool gear and inner circumference by mounting the inner diameter measuring unit (optional).

Tooth flank of a precision gear

Form measurement and surface roughness evaluation of a precision gear.

End mill measurement

High precision measurement of outer diameter, rake angle and clearance angle out of profile data.

Precision micro punch

Easy measurement and evaluation of precision punch.

Contour form and edge measurements of drill

The laser probe offers quantitative measurement of tools in high precision.

Cutting edge measurement

Quantitative evaluations of tip of turning tool and its wear state.

Ultraprecision machining tool (Diamond Round cutting tool)

Capable of measuring tool blade edge which popular projection type tool measuring instruments cannot measure.


Capable of measuring diameters / depths of small diameter nozzles such as inkjet, spinneret, etc.