Japanese

NH-4Ns  “Point Autofocus Probe 3D Measuring Instrument”

The perfect solution for densified and large-scaled semiconductor quality control

Specification

  • measuring range (X, Y, Z) = 250 x 200 x 10mm
    Z = 110mm (optional)
  • scale resolution (X, Y, Z) = 0.1 x 0.1 x 0.01μm

Measurement example that NH-4Ns is perfect for

Warpage and waviness of wafer

High speed measurement of total warpage and waviness of wafer.

Measurable Examples

Measurable Examples with Optional Modules

More Information

We welcome your inquiry by telephone / fax / information request form.

Phone: +81-422-49-1491
Fax: +81-422-49-1117
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