Scan AF function which provides 50 times faster measuring speed than Mitaka conventional measuring speed and the high precision XY scanning stage offer a large measuring area of several tens of millimeters down to the sub micrometer level. PF-60 is perfect for warpage measurement of precision processing parts, molding defects, wear volume and scratch of quantitative evaluations in tribology.
Scan AF function offers large measuring area in high speed
Large measuring area and high precision measurement
Fast 3D measurement
The conventional measuring method requires 1 hour and 20 minutes whereas the fast scanning AF function requires only 6 minutes.
Excellent angle tracking capability
Easy positioning of the measuring point
The objective changer switches between a low magnification objective for observation and a high magnification objective for measurement in a single step operation.
Measuring method approved by ISO
Scanning XY stage
Point autofocus probe
The reflected laser beam from the workpiece surface passes through the objective again and forms an image on the autofocus sensor (AF sensor). The AF sensor detects the laser spot displacement in real time and adjusts the AF microscope back to the in-focus position.
High correlation with the international standards for roughness measurement
・Measurement method: stylus
・Tip radius: 5µm
・Sampling length (ln): 4mm
・Cutoff value(λc): 0.8mm
Autofocus optical sytem cuts ghost and stray light
3D measurement and evaluation
It also offers high-precision analysis on the obtained data using form removal, extraction of a profile, etc.
Measuring range (X, Y, Z, AF)
60 × 60 × 60 × 10 mm
X-Y-axes scale resolution
AF-axis scale resolution
Point Autofocus ISO 25178-605
Examples of measurements that this equipment is good at
HDD head suspension
High-density mounting board
Diamond abrasive grain
Tip of turning tool
Warpage and waviness of wafer
Grinding work surface
Wear volume of brake pad
Examples that can be measured with this equipment
We welcome your inquiry by telephone / fax / information request form.
- +81 422-49-1491
- +81 422-49-1117